| 摘要 |
PURPOSE: A reactant distribution device and a transmitting method for evaporating the material in a semiconductor material are provided to reduce the waste and increase the utilization of the liquid or the solid bulb chemical substance by maintaining the liquid bulb chemical substance. CONSTITUTION: A reactant distribution device and a transmitting method for evaporating the material in a semiconductor material are as follows. The vapor reaction material distribution device is provided. The source chemical material is added to the vapor reaction material distribution device. The carrier gas is supplied to a vapor reaction material distribution device through a tube(103) and carrier gas supply line. The vapor reaction material and carrier gas are collected from the vapor reaction material distribution device through the vapor reaction material exhaust line.
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