| 摘要 |
PURPOSE: An apparatus and a method for cleaning an image sensor are provided to effectively remove organic material and inorganic material on a surface of an image sensor by separately performing cleaning using an organic removal cleaning solution and cleaning using an inorganic removal cleaning solution. CONSTITUTION: An apparatus for cleaning an image sensor includes a first cleaning module(110), a second cleaning module(120), a rinse module(130,140), and a dry module(150). The first cleaning module cleans an image sensor through an organic removal cleaning solution. The organic removal cleaning solution chemically removes organic material on a surface of the image sensor. The second cleaning module cleans the image sensor through an inorganic removal cleaning solution. The inorganic removal cleaning solution removes inorganic material on a surface of the image sensor. The rinse module cleans the image sensor. The dry module dries the image sensor.
|
