| 摘要 |
PROBLEM TO BE SOLVED: To provide an inkjet head reducing a film thickness unevenness even by superimposing coating, a coating device and a coating method, and a method of manufacturing a radiation detector. SOLUTION: The inkjet head 604 has a plurality of nozzles 609 for discharging a solution that line in a vertical scanning direction. The plurality of nozzles 609 are arranged rough in both ends 604a and 604c in the vertical scanning direction, and closely in the center part 604b. A main scanning process for relatively moving the inkjet head 604 in a main scanning direction to a substrate 601 while allowing the nozzles 609 to discharge the solution, and a vertical scanning process for relatively moving the inkjet head in the vertical scanning direction to the substrate are alternately repeated to coat the substrate surface with the solution. In the main scanning process, in the main scanning process just prior to between the vertical scanning processes, the solution is applied to the area of the substrate surface to which the solution is applied by one end 604c of the inkjet head 604, with at least a part of the other end 604a of the inkjet head 604 lapped. COPYRIGHT: (C)2010,JPO&INPIT
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