| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment device capable of performing forced cooling immediately after a treated object is heated. SOLUTION: The heat treatment device 10 is provided with a heating chamber 11 and a cooling fluid tank 30 arranged below the heating chamber 11. A first opening part 20 is formed on the bottom part of the heating chamber 11, and a second opening part 31 is formed on the upper part of the cooling fluid tank 30. The first opening part 20 is opened/closed by a shutter member 22. The treated object W is held by a holding member 13, and the holding member 13 is lifted/lowered by a lifting/lowering mechanism 14 between the heating chamber 11 and the cooling fluid tank 30 through the first and second opening parts 20, 31. COPYRIGHT: (C)2010,JPO&INPIT |
