发明名称 METHOD FOR PROVIDING A NANOSCALE, HIGH ELECTRON MOBILITY TRANSISTOR (HEMT) ON INSULATOR
摘要 Various embodiments include forming a silicon-germanium layer over a substrate of a device; forming a layer in the silicon-germanium layer, the layer including at least one of boron and carbon; and forming a silicon layer over the silicon-germanium layer. Additional embodiments are described.
申请公布号 US2009258478(A1) 申请公布日期 2009.10.15
申请号 US20090489353 申请日期 2009.06.22
申请人 ATMEL CORPORATION 发明人 ENICKS DARWIN G.
分类号 H01L21/20 主分类号 H01L21/20
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