发明名称 Thin seeded Co/Ni multilayer film with perpendicular anisotropy for spintronic device applications
摘要 A spin valve structure for a spintronic device is disclosed and includes a composite seed layer made of at least Ta and a metal layer having a fcc(111) or hcp(001) texture to enhance perpendicular magnetic anisotropy (PMA) in an overlying (Co/Ni)x multilayer. The (Co/Ni)x multilayer is deposited by a low power and high Ar pressure process to avoid damaging Co/Ni interfaces and thereby preserving PMA. As a result, only a thin seed layer is required. PMA is maintained even after annealing at 220° C. for 10 hours. Examples of GMR and TMR spin valves are described and may be incorporated in spin transfer oscillators and spin transfer MRAMs. The free layer is preferably made of a FeCo alloy including at least one of Al, Ge, Si, Ga, B, C, Se, Sn, or a Heusler alloy, or a half Heusler alloy to provide high spin polarization and a low magnetic damping coefficient.
申请公布号 US2009257151(A1) 申请公布日期 2009.10.15
申请号 US20090456621 申请日期 2009.06.19
申请人 TDK CORPORATION & KABUSHIKI KAISHA TOSHIBA 发明人 ZHANG KUNLIANG;LI MIN;ZHOU YUCHEN;OIKAWA SOICHI;YAMADA KENICHIRO;KOUI KATSUHIKO
分类号 G11B5/33;B05D5/00;C23C14/35 主分类号 G11B5/33
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