| 摘要 |
PURPOSE: A vacuum valve is provided to improve a flow of a purge gas from a bellows to a purge gas exhaust part. CONSTITUTION: A vacuum valve(1) includes a main body(3), a valve body, a driving part(2), a bellows, a purge gas supply part(37), and a purge gas exhaust part. In the valve body, a valve sheet is formed between a first opening part and a second opening part(7). The valve body is contacted in the valve sheet, or is separated from the valve sheet. The driving part gives a driving force to the valve body by coupling a load member protruded inside the main body with the valve body. The bellows is arranged inside the main body in order to cover the load member. The purge gas supply part is prepared between the main body and the driving part.
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