PATTERNING METHOD USING POLYATOMIC MOLECULE,申请号KR20070107939-传众专利搜索

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发明名称	PATTERNING METHOD USING POLYATOMIC MOLECULE
摘要
申请公布号	KR100921932(B1)	申请公布日期	2009.10.15
申请号	KR20070107939	申请日期	2007.10.25
申请人		发明人
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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