| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma generating apparatus by which a droplet mixed in plasma can be efficiently removed and surface processing accuracy can be improved in film formation wherein high purity plasma is used, and also to provide a plasma processing apparatus using such plasma generating apparatus. Ž<P>SOLUTION: A droplet removing section arranged in a plasma traveling part is composed of: a straight plasma travelling pipe P0 connected to a plasma generating section A; a first plasma travelling pipe P1 connected to the straight plasma travelling pipe P0 by being bent; a second plasma travelling pipe P2 connected to an end of the first plasma travelling pipe P1 by being diagonally arranged at a prescribed flexion angle with respect to the pipe axis of the first plasma travelling pipe; and a third plasma travelling pipe P3, which is connected to an end of the second plasma travelling pipe P2 by being bent and discharges plasma from a plasma discharge port. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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