发明名称 |
VERFAHREN ZUR HERSTELLUNG VON SYNTHETISCHEN QUARZGLASELEMENTEN FÜR EXCIMERLASER UND DAZU HERGESTELLTE SYNTHETISCHE QUARZGLASELEMENTE |
摘要 |
<p>In the light of the disadvantages of the prior art technology, an object of the present invention is to provide a method for producing a synthetic quartz glass member for excimer lasers, which comprises, while suppressing the generation of reductive defects which impairs the resistance against laser radiations, incorporating a sufficient amount of hydrogen molecules capable of achieving a high resistance against laser radiation into the quartz glass, yet uniformly incorporating the hydrogen molecules to realize a flat distribution in refractive indices attributed to the distribution in the density of hydrogen molecules. It is also an object of the present invention to provide a synthetic quartz glass member for excimer lasers obtained by the production method above, which yields high resistance against laser radiations and homogeneity. The above problems have been overcome by a method for producing a synthetic quartz glass member for excimer lasers comprising a step of incorporating hydrogen molecules into a synthetic quartz glass body by heat treating the synthetic quartz glass body at a temperature of 600 DEG C or lower under an atmosphere in a pressure range of 1 atm or higher but lower than 150 atm and containing hydrogen, said method comprises varying the pressure of the gas containing hydrogen either continuously or stepwise in at least a part of the heat treatment. <IMAGE></p> |
申请公布号 |
AT443688(T) |
申请公布日期 |
2009.10.15 |
申请号 |
AT20020003077T |
申请日期 |
2002.02.13 |
申请人 |
HERAEUS QUARZGLAS GMBH & CO. KG;SHIN-ETSU QUARTZ PRODUCTS CO., LTD. |
发明人 |
NISHIMURA, HIROYUKI;YOKOTA, TORU;FUJINOKI, AKIRA |
分类号 |
C03B19/14;C03C3/06;G03F7/20 |
主分类号 |
C03B19/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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