| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem of being a limit of resolution in several ten nanometer, and the problem of being remarkably low in measurement reproducibility by damage and abrasion of a probe, since the opening formation of several ten nm is practically a limit in a near-field scanning microscope using an opening probe and the external illuminating light becomes background noise in the near-field scanning microscope using a scattering probe. SOLUTION: A plasmon-increased near-field probe having the optical separation function of a nanometer-order is constituted by combining a cylindrical structure of the nanometer- order and a microscopic structure of the nanometer-order, and optical information and recess-projection information on a sample surface are measured with nanometer-order resolution and high reproducibility, without damaging both the probe and a sample, by repeating the approach-retreat by low contact force at respective measuring points on the sample. COPYRIGHT: (C)2010,JPO&INPIT |
