| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning device capable of obtaining a high performance and high yield material to be processed by accurately positioning the processing position of a processing apparatus based on the measured positioning information of a surface to be processed of the material to be processed. SOLUTION: The positioning device includes control parts (23, 26, 27, 28, 29) for controlling a main-scanning shaft 3 and sub-scanning shaft 10 so that the processing position of the inkjet head 4 is brought to the target position by a correction action which moves the processing position of an inkjet head 4 to the sub-scanning direction relative to the surface to be processed by the sub-scanning shaft 10, when the processing position of the inkjet head 4 is moved to the main-scanning direction toward a target position on the surface to be processed on a substrate 1 by the main-scanning shaft 3, and if the target position is shifted to the sub-scanning direction based on the position of the site to be processed on the surface to be processed of the substrate 1 stored in a substrate position memory part 25. COPYRIGHT: (C)2010,JPO&INPIT |
