| 摘要 |
PROBLEM TO BE SOLVED: To provide a frequency adjusting apparatus for a piezoelectric vibration device that is simply configured and improves production efficiency. SOLUTION: A frequency adjusting apparatus for a piezoelectric vibration device includes: a vacuum chamber 1; an ion gun 2 provided inside the vacuum chamber; a crystal vibrator (piezoelectric vibration device) 3; a pallet 4 for mounting the crystal vibrator thereon; and a conveying mechanism for conveying the pallet 4. The apparatus has a frequency measuring section 6, a vacuum pump 7 (not shown in the figure) or an inert gas supplying section 23, and the like outside the vacuum chamber. The ion gun 2 is placed under the pallet, and the ion gun 2 is movable by an actuator 25. COPYRIGHT: (C)2010,JPO&INPIT
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