| 摘要 |
PROBLEM TO BE SOLVED: To provide a contact displacement meter capable of accurate displacement measuring, even when the movement speed of a contact is fast, as well as, having high resistance property with respect to optical noise. SOLUTION: This displacement meter is equipped with a moving scale provided on an optical path from a light-emitting element to a line sensor, having each reference light passing region arrayed in a line in one direction, and a lattice region wherein each light passing region and each light shielding region are alternately arrayed substantially at equal intervals, at a second array pitch in one direction between each reference light passing region, and moving in one direction, together with the contact. As for the reference light passing region, a distance between each adjacent reference light passing region has a unique value in the movement scale. A peak position of the reference light passing region, at which a received light signal of light passed through the reference light passing region assumes the maximum value is detected, and an absolute position of the reference light passing region is specified, based on the distance between the adjacent peak positions. A relative position to the line sensor of the reference light passing region is specified based on a received light signal of light passed through a lattice region. A displacement of the contact is calculated, based on the specified absolute position and the relative position. COPYRIGHT: (C)2010,JPO&INPIT
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