| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing polished glass substrates, by which the surfaces of a number of glass substrates are simultaneously polished by a simple operation without causing breakage in the glass substrate by using a small-sized device and polished glass substrates each having a smooth glass surface can be manufactured safely in a high yield and with productivity. Ž<P>SOLUTION: Both of the front surface and rear surface of the outer peripheral part and end parts of each glass substrate 1 are masked with a masking material 2 non-permeable to liquid and capable of imparting strength. Then, each masked glass substrate 1 is arranged in the up-and-down direction in such a manner that the glass substrate 1 subjected to masking is supported by the masking part 2a, and the glass substrates 1 are set side by side in a carrier 3 so that an interval between surfaces is kept. Thereafter, the glass substrates 1 set in the carrier 3 are immersed into a polishing solution 5 so as to polish the both surfaces of each glass substrate 1. Each polished glass substrate is manufactured by supporting one surface of the polished glass substrate 1 on an additional stage 10 situated in the inside of the masking parts 2a and cutting the substrate 1 by using a cutter 11. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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