TANTAL- UND NIOB-VERBINDUNGEN UND IHRE VERWENDUNG FÜR DIE CHEMICAL VAPOUR DEPOSITION (CVD),申请号AT20070113162T-传众专利搜索

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发明名称	TANTAL- UND NIOB-VERBINDUNGEN UND IHRE VERWENDUNG FÜR DIE CHEMICAL VAPOUR DEPOSITION (CVD)
摘要
申请公布号	AT443067(T)	申请公布日期	2009.10.15
申请号	AT20070113162T	申请日期	2007.07.26
申请人	H.C. STARCK GMBH	发明人	REUTER, KNUD;KIRCHMEYER, STEFAN;GAESS, DANIEL;POKOJ, MICHAEL;SUNDERMEYER, JOERG;STOLZ, WOLFGANG;OCHS, THOMAS;VOLZ, KERSTIN
分类号	C07F9/00;H01L21/285	主分类号	C07F9/00
代理机构		代理人
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地址

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