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发明名称
ORGANISCHE ANTIREFLEXBESCHICHTUNGSZUSAMMENSETZUNGEN FÜR DIE FORTGESCHRITTENE MIKROLITHOGRAPHIE
摘要
申请公布号
AT444316(T)
申请公布日期
2009.10.15
申请号
AT20020797325T
申请日期
2002.12.13
申请人
BREWER SCIENCE, INC.
发明人
DESHPANDE, SHREERAM
分类号
C08F220/68;C08F8/14;C08F24/00;C08F34/02;C08G59/14;C08G59/32;C08G59/42;C08G59/62;C08G63/68;C08G63/91;C08G65/329;C09D133/02;C09D163/00;C09D167/00;C09D171/02;C09D201/02;G03F7/00;G03F7/09
主分类号
C08F220/68
代理机构
代理人
主权项
地址
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