METHOD OF MANUFACTURING OPTICAL SEMICONDUCTOR ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing an optical semiconductor element in which projections contributing to improvement in extraction efficiency of light are formed uniformly on a light emission surface.

SOLUTION: The method of manufacturing the optical semiconductor element includes a preprocessing stage of forming a plurality of projections 401 on the light emission surface and a processing stage of subjecting the light emission surface to anisotropic etching 404. The projections 401 are formed in the preprocessing stage and then can be processed by the anisotropic etching 404 in the processing stage, thereby forming the projections 403 so shaped as to improve the extraction efficiency of light uniformly on the light emission surface.

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