摘要 |
<P>PROBLEM TO BE SOLVED: To provide a NOx sensor can accurately obtain the resistance value of a heater. <P>SOLUTION: When a second layer is laminated immediately above a first layer on which the heater for electrically heating the proximity of an inner space of the NOx sensor and two heater leads having almost the same shape which are energizing paths to the heater are formed, the second layer on which at least one of leads being formed out of a first lead for electrically connecting a reference electrode to outside, a second lead for electrically connecting a measuring electrode to outside, and a third lead for electrically connecting a plurality of pump electrodes to outside, the lead formed on the second layer is arranged so as not to overlap any of two heater leads in a laminating direction of the first layer and the second layer. <P>COPYRIGHT: (C)2010,JPO&INPIT |