LOW PRESSURE DEPOSITION OF ORGANIC THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a low pressure manufacturing method for thin films particularly used for nonlinear optical devices and organic light-emitting devices with reference to manufacturing of thin films of optical quality.

SOLUTION: A method for forming organic thin films on substrates (58) has steps of providing a plurality of organic precursors (14, 48) in the vapor phase, and reacting the plurality of organic precursors (14, 48) under reduced pressure. The thin films manufactured by such a method and apparatuses used to carry out such a method are included. The method is well-suited to the formation of organic light emitting devices and other display-related technologies.

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