CLOSED CONTAINER, LID OPENING AND CLOSING SYSTEM FOR CLOSED CONTAINER, WAFER TRANSFER SYSTEM, AND LID CLOSING METHOD FOR THE CLOSED CONTAINER

摘要

PROBLEM TO BE SOLVED: To provide a structure for detecting that a lid is properly fixed to a pod, when the lid closes an aperture of the pod in a FIMS system.

SOLUTION: A plurality of detection marks that are detectable from outside are arranged on the lid of the pod, the structure is known that the lid is properly fixed to the lid of the pod body by the detection marks at predetermined positions.

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