摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve the beam quality of a converted beam obtained after wavelength conversion and to bond a coat substrate to an optical waveguide substrate, in a wavelength conversion element for forming a wavelength conversion part in a ridge type optical waveguide of an optical waveguide substrate and bonding the coat substrate to the surface of the optical waveguide substrate. <P>SOLUTION: The waveguide conversion element includes: a supporting base 1; an optical waveguide substrate 5 set on the supporting base 1 and provided with a ridge type optical waveguide 6 composed of a ferroelectric material and having a wavelength conversion function, grooves 7A, 7B respectively formed on both the sides of the optical waveguide 6, and extension parts 8A, 8B formed on the outsides of the grooves 7A, 7B; a coat substrate 13 formed on the optical waveguide substrate 5; a first adhesive layer 2 for sticking the optical waveguide substrate 5 to the supporting base 1; and a second adhesive layer 12 for bonding the coat substrate 13 to the optical waveguide substrate 5. Recessed parts 9 are formed on the second adhesive layer side surfaces of the extension parts 8A, 8B by scanning of laser light. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |