| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that defects are often found too excessively in a device using image processing to automatically check the defects in the patterns manufactured by the film forming process since the check criterions are set in a safer side and although some foreign substances put on in a certain process are often washed away in the following processes but recorded and accumulated as defects especially when manufacturing the patterns through many film forming processes, resulting in increase of the number of defects to be finally checked. SOLUTION: By comparing the defect data until this time with the latest defect data after a number of processes, a final defect check table is formed for the defects overlapping through all the processes. COPYRIGHT: (C)2010,JPO&INPIT |
