| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate treatment apparatus can recycle heat, is free of a problem even if piping breaks, and suppress a rise in cost of the apparatus. Ž<P>SOLUTION: Through heat exchange of a double container 27, heat is recycled between a discharged phosphoric acid and a supplied phosphoric acid. The heat exchange is made mutually between the phosphoric acids, so even if an inner container 29 of the double container 27 breaks, there is no problem. Additionally, the supplied phosphoric acid is warmed without providing a preliminary temperature control unit as a different body and then a rise in cost of the apparatus is suppressed. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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