| 摘要 |
PROBLEM TO BE SOLVED: To provide a zoom phase difference observation apparatus capable of continuously and efficiently changing observation magnification, and an illuminator for phase difference observation suitable for low magnification observation. SOLUTION: The zoom phase difference observation apparatus is composed of: the illuminator 20 for supplying a sample surface with light flux of conical cylinder shape with an outer surface and an inner surface parallel with each other; an objective lens 31 condensing direct light traveling straight through the sample surface and diffracted light diffracted by the sample surface; a phase plate 32 for changing the phase of the direct light that has passed through the objective lens 31; an imaging lens 33 condensing the direct light that has passed through the phase plate 32 and the diffracted light that has passed through the objective lens 31, on an imaging surface; and an afocal zoom lens 40 arranged between the phase plate 32 and the imaging lens 33. COPYRIGHT: (C)2010,JPO&INPIT
|
