HEAT EQUALIZER AND ORGANIC FILM FORMING APPARATUS

摘要

A heat equalizer comprising a container structure with a heating block (1) capable of heating a material to be heated and vaporizing the same, filled thereinside with a working fluid; heating means (6) disposed on the bottom of the container structure; and a material supply pipe (11) realizing communication between the outside and the inside of the container structure. The heating block (1) is provided with a main header pipe (12) as a flow channel for flow of the material to be heated that is connected to the material supply pipe (11) and extends in a horizontal direction and with a riser pipe (14) branched from the main header pipe (12) and extending in a vertical direction. Further, the heating block is provided with a condensation hole (10) as a condensation channel for cooling and condensation of the working fluid that lies on both sides of the riser pipe (14) and extends in a horizontal direction and with a condensation pit (16) lying on the underside of the riser pipe (14). The main header pipe (12) is disposed between the condensation hole (10) and the condensation pit (16).