发明名称 |
CMP PAD CONDITIONERS WITH MOSAIC ABRASIVE SEGMENTS AND ASSOCIATED METHODS |
摘要 |
A CMP pad conditioner comprises a plurality of abrasive segments. Each abrasive segment includes a segment blank and an abrasive layer attached to the segment blank, the abrasive layer including a superhard abrasive material, A pad conditioner substrate is also provided. Each of the plurality of abrasive segments is permanently affixed to the pad conditioner substrate in an orientation that enables removal of material from a CMP pad by the abrasive layer as the pad conditioner and the CMP pad are moved relative to one another.
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申请公布号 |
WO2009043058(A3) |
申请公布日期 |
2009.10.15 |
申请号 |
WO2008US78208 |
申请日期 |
2008.09.29 |
申请人 |
SUNG, CHIEN-MIN;SUNG, MICHAEL |
发明人 |
SUNG, CHIEN-MIN;SUNG, MICHAEL |
分类号 |
B24D7/06;B24B53/02;B24B53/12;H01L21/304 |
主分类号 |
B24D7/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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