发明名称 |
ANALYTE CARRIER AND ITS MANUFACTURING METHOD |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide an analyte carrier having a high degree of design freedom in the size of metallic head parts etc. and provide its manufacturing method. Ž<P>SOLUTION: A method for manufacturing the analyte carrier 1 for carrying an analyte M used for Raman spectroscopic analysis includes both a pillar part forming step of forming a plurality of pillar parts 22, which are approximately vertically raised by forming recession parts 4 recessed approximately vertically to the surface of a substrate 10 in the substrate 10, in the substrate 10 and a metallic head part forming step of forming the metallic head parts 3 at tip parts 23 of the pillar parts 22 by depositing metal 31 at the tip parts 23 in such a way as to cover the tip parts 23 by physical vapor deposition or chemical vapor deposition. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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申请公布号 |
JP2009236830(A) |
申请公布日期 |
2009.10.15 |
申请号 |
JP20080085922 |
申请日期 |
2008.03.28 |
申请人 |
SUMITOMO PRECISION PROD CO LTD |
发明人 |
TORAYASHIKI OSAMU;MISAKI TOKIKO |
分类号 |
G01N21/65;B81C99/00;H01L21/027 |
主分类号 |
G01N21/65 |
代理机构 |
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地址 |
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