发明名称 ANALYTE CARRIER AND ITS MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide an analyte carrier having a high degree of design freedom in the size of metallic head parts etc. and provide its manufacturing method. Ž<P>SOLUTION: A method for manufacturing the analyte carrier 1 for carrying an analyte M used for Raman spectroscopic analysis includes both a pillar part forming step of forming a plurality of pillar parts 22, which are approximately vertically raised by forming recession parts 4 recessed approximately vertically to the surface of a substrate 10 in the substrate 10, in the substrate 10 and a metallic head part forming step of forming the metallic head parts 3 at tip parts 23 of the pillar parts 22 by depositing metal 31 at the tip parts 23 in such a way as to cover the tip parts 23 by physical vapor deposition or chemical vapor deposition. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2009236830(A) 申请公布日期 2009.10.15
申请号 JP20080085922 申请日期 2008.03.28
申请人 SUMITOMO PRECISION PROD CO LTD 发明人 TORAYASHIKI OSAMU;MISAKI TOKIKO
分类号 G01N21/65;B81C99/00;H01L21/027 主分类号 G01N21/65
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