发明名称 DICING DIE-BONDING TAPE
摘要 <P>PROBLEM TO BE SOLVED: To provide a dicing die-bonding tape wherein a semiconductor wafer and a die-bonding film are precisely cut by laser dicing, and after the laser dicing, a semiconductor chip is easily released together with the die-bonding film. Ž<P>SOLUTION: The dicing die-bonding tape for laser dicing includes a die-bonding film 3 and a non-adhesive film 4 pasted on one side 3a of the die-bonding film 3. The die-bonding film 3 contains a thermosetting compound and thermosetting agent. The non-adhesive film 4 contains resin bridging substance as a main component. The dicing die-bonding tape has the storage elasticity at 25°C of 1-1,000 MPa, and that at 60°C of 1 MPa or higher. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2009239190(A) 申请公布日期 2009.10.15
申请号 JP20080086431 申请日期 2008.03.28
申请人 SEKISUI CHEM CO LTD 发明人 WATABE KOJI
分类号 H01L21/301;H01L21/52 主分类号 H01L21/301
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