发明名称 |
SOLAR PARAMETRIC TESTING MODULE AND PROCESSES |
摘要 |
Embodiments of the present invention generally relate to a module that can test and analyze various regions of a solar cell device in an automated or manual fashion after one or more steps have been completed in the solar cell formation process. The module used to perform the automated testing and analysis processes can also be adapted to test a partially formed solar cell at various stages of the solar cell formation process within an automated solar cell production line. The automated solar cell production line is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices.
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申请公布号 |
US2009256581(A1) |
申请公布日期 |
2009.10.15 |
申请号 |
US20090409732 |
申请日期 |
2009.03.24 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
LU DANNY CAM TOAN;MARRIOTT MICHAEL;SVIDENKO VICKY;WANG DAPENG;FREI MICHEL R. |
分类号 |
G01R27/08;B65G47/00;H01L21/683 |
主分类号 |
G01R27/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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