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发明名称
摘要
申请公布号
JP2009536787(A)
申请公布日期
2009.10.15
申请号
JP20090509652
申请日期
2007.04.30
申请人
发明人
分类号
H01L21/3065
主分类号
H01L21/3065
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代理人
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地址
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