| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent damages of a weight, beams, and piezoelectric resistance elements and their characteristic changes, and to enhance the reliability of the acceleration sensor device. <P>SOLUTION: The acceleration sensor device includes an acceleration sensor chip 10 that has a weight 11, a base 12 provided around this weight 11 with a gap therebetween, and a plurality of beams 13 flexibly connecting the weight 11 and the base 12; and a stopper plate 20 provided above the sensor chip 10 to regulate the displacement of the weight 11. Since the stopper plate 20 has recessions 25 at positions facing the beams 13, the stopper plate can restrict the displacement of the weight 11 without applying impulses to the beams 13. <P>COPYRIGHT: (C)2010,JPO&INPIT |
