发明名称 DEVICE FOR MEASURING A PARTICLE STREAM
摘要 The particle stream of electrically charged particles, created in a mass spectrometer (10) is fed to a splitter (14) which allows one portion of the particle stream to pass through and traps another portion. The first portion is supplied directly, or via a scintillator (21), to a secondary electron multiplier (25) with an extremely high amplification. The pulses created by the incident particles (ions) are counted by a pulse counter (30) or received by an analogue amplifier (32) and processed further. An approximate measuring branch (17) amplifies the electric current that exits the splitter (14). Both measuring branches are combined in an evaluation unit (31). The measuring device has a rapid response time and a wide measuring range.
申请公布号 WO2009027252(A3) 申请公布日期 2009.10.15
申请号 WO2008EP60773 申请日期 2008.08.15
申请人 INFICON GMBH;ROLFF, NORBERT 发明人 ROLFF, NORBERT
分类号 H01J49/02 主分类号 H01J49/02
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