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发明名称
Positive resist composition and pattern formation method using the positive resist composition
摘要
申请公布号
EP1835343(B1)
申请公布日期
2009.10.14
申请号
EP20070005242
申请日期
2007.03.14
申请人
FUJIFILM CORPORATION
发明人
IWATO, KAORU;KODAMA, KUNIHIKO;YOSHIDA, YUKO;YAMAMOTO, KEI
分类号
G03F7/039
主分类号
G03F7/039
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代理人
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