| 摘要 |
PURPOSE: An optical measurement apparatus and an inspection apparatus including the same are provided to prevent problems by rotating a revolver in which an objective lens is mounted. CONSTITUTION: An optical measurement apparatus(100) includes 1 ~ 3 objective lenses, 1 ~ 3 electronic shutters, a reflective mirror, a half-transparent mirror, a camera, and a light source. The objective lenses(141a,141b,141c) have different magnification. The electronic shutters are corresponded to each lenses. A plurality of reflective mirrors(135,137) and the half-transparent mirror are locate on an optical path of the objective lenses. The camera(131) outputs the images to a monitor. The light source(121) supplies the light to the lenses.
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