| 摘要 |
<p>There is provided a signal separation circuit of an angular velocity sensor where a first sensing section, a second sensing section and a third sensing section which are arranged in two second arms are connected to a detection circuit section, and in this detection circuit section, an angular velocity is detected based upon angular velocity signals outputted from the first to third sensing electrode sections. A configuration is formed where angular velocity signals include an X component signal around an X axis, a Y component signal around a Y axis, a Z component signal around a Z axis and an oscillating component signal of a flexible body in the mutually orthogonal X axis, Y axis and Z axis, and the detection circuit section is provided with a separation circuit that separates these X component signal, Y component signal, Z component signal and oscillating component signal.</p> |
