METHOD OF MANUFACTURING THE NON-SHRINKAGE CERAMIC SUBSTRATE

摘要

PURPOSE: A method of manufacturing a non-shrinkage ceramic substrate is provided to improve adhesive strength of the external electrode and ceramic laminated body by removing residue of the ceramic laminated body with a microwave. CONSTITUTION: A method of manufacturing a non-shrinkage ceramic substrate is comprised of the steps: preparing a ceramic laminated body including an inner electrode and a via hole, a structure composed of a plurality of insulating sheet; arranging a restriction sheet on the top and bottom of the ceramic laminated body to suppress compression in direction to a plane of each insulating sheet(S3); sintering insulting sheet and making the ceramic laminated body a ceramic sintered body(S4); and removing restriction sheet from the ceramic sintered body(S5).