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发明名称
摘要
申请公布号	JP4342639(B2)	申请公布日期	2009.10.14
申请号	JP19990155439	申请日期	1999.06.02
申请人		发明人
分类号	C23C14/34;H01L21/285	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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