,申请号JP20000121952-传众专利搜索

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发明名称
摘要
申请公布号	JP4342691(B2)	申请公布日期	2009.10.14
申请号	JP20000121952	申请日期	2000.04.24
申请人		发明人
分类号	C23C14/00;H01L21/683;C23C14/34;H01L21/68	主分类号	C23C14/00
代理机构		代理人
主权项
地址

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