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发明名称
Method for manufacturing an SOI substrate
摘要
申请公布号
EP1981083(A3)
申请公布日期
2009.10.14
申请号
EP20080005514
申请日期
2008.03.25
申请人
SHIN-ETSU CHEMICAL COMPANY, LTD.
发明人
KAWAI, MAKOTO;KUBOTA, YOSHIHIRO;ITO, ATSUO;TANAKA, KOICHI;TOBISAKA, YUUJI;AKIYAMA, SHOJI
分类号
H01L27/12;H01L21/04;H01L21/762
主分类号
H01L27/12
代理机构
代理人
主权项
地址
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