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发明名称
摘要
申请公布号
JP4343198(B2)
申请公布日期
2009.10.14
申请号
JP20060212061
申请日期
2006.08.03
申请人
发明人
分类号
H01L21/822;H01L21/3205;H01L21/768;H01L23/52;H01L27/04
主分类号
H01L21/822
代理机构
代理人
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