| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of efficiently recovering fluorine from a decomposition product gas of a PFC gas used in a CVD apparatus or the like. <P>SOLUTION: Method of recovering fluorine from the decomposition product gas produced by the decomposition of the PFC gas is performed by removing a solid powdery component contained in the decomposition production gas by passing the decomposition product gas through a dry powder removing apparatus (4) to obtain a dust-free gas and supplying the dust-free gas to a dry fluorine recovering reaction apparatus (5) in which a fluorine absorbent composed of a salt, hydroxide or oxide of an alkaline earth metal alone or the mixture of them is filled to react hydrogen fluoride in the decomposition production gas with the alkaline earth metal to recover as alkaline earth metal fluoride. As the fluorine absorbent, calcium carbonate or calcium hydroxide is suitably used. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
