| 发明名称 |
PLASMA ETCHING OF DIAMOND SURFACES |
| 摘要 |
<p>Electronic field effect devices, and methods of manufacture of these electronic field effect devices are disclosed. In particular, there is disclosed an electronic field effect device which has improved electrical properties due to the formation of a highly mobile two-dimensional charge-carrier gas in a simple structure formed from diamond in combination with polar materials.</p> |
| 申请公布号 |
EP2108054(A1) |
申请公布日期 |
2009.10.14 |
| 申请号 |
EP20080702485 |
申请日期 |
2008.01.22 |
| 申请人 |
ELEMENT SIX LIMITED |
发明人 |
LEE, CHEE-LEONG;GU, ERDAN;SCARSBROOK, GEOFFREY ALAN;FRIEL, IAN;DAWSON, MARTIN DAVID |
| 分类号 |
H01L29/36;C23C16/27;C30B25/10;C30B25/20;C30B29/04;G01N27/30;H01L21/02;H01L21/04;H01L29/04;H01L29/16;H01L29/167 |
主分类号 |
H01L29/36 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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