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发明名称
Exposure apparatus and device manufacturing method using the same
摘要
申请公布号
EP1069477(B1)
申请公布日期
2009.10.14
申请号
EP20000203428
申请日期
1997.06.03
申请人
CANON KABUSHIKI KAISHA
发明人
INOUE, MITSURU;EBINUMA, RYUICHI;IWAMOTO, KAZUNORI;OSANAI, EIJI;TAKEISHI, HIROAKI
分类号
G03F7/20;H01L21/027
主分类号
G03F7/20
代理机构
代理人
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