Microsystem, in particular a microgyrometer, with a detection element having capacitive electrodes,申请号EP20070354045-传众专利搜索

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发明名称	Microsystem, in particular a microgyrometer, with a detection element having capacitive electrodes
摘要
申请公布号	EP1895270(A3)	申请公布日期	2009.10.14
申请号	EP20070354045	申请日期	2007.08.07
申请人	COMMISSARIAT A L'ENERGIE ATOMIQUE	发明人	DIEM, BERNARD
分类号	G01C19/02;G01C19/56	主分类号	G01C19/02
代理机构		代理人
主权项
地址

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