HIGH TEMPERATURE SCRUBBER FOR DISPOSAL OF PFCS GAS

摘要

PURPOSE: A scrubber for perfluoro gas compound at high temperature is provided to remove HF gas of 99% or more, and to increase effectiveness of the PFCs gas treatment by reducing the heating time of a heater. CONSTITUTION: A scrubber for perfluoro gas compound at high temperature comprises the followings: a heating chamber(40) processing the transferred PFCs gas at a high temperature; a cooling zone(50) formed on the bottom of the heating chamber, cooling the processed gas with fine by-products; a first wet chamber(60) processing the guided gas through the cooling zone; a second wet chamber(70) dissolving and processing the processed gas in the first wet chamber; and a demister(80) collecting impurities and moisture processed through the second wet chamber.