| 摘要 |
<p>PURPOSE: A light irradiation apparatus is provided to remove a spot of an ultraviolet ray irradiated on a bonded substrate since an absorption tube has the optical permeability. CONSTITUTION: A light irradiation apparatus projects a light on a target arranged under a mask shading the light. The light is projected from a light source(40) and is passed through shading mask arranged under the light source. The light irradiation apparatus includes a supporting member(24) and an absorption tube(30). The supporting member is formed above the shading mask, and the absorption tube is supported by the supporting member. The absorption tube has an optical permeability, and the absorption tube sucks and holds the shading mask through vacuum suction.</p> |
