发明名称 NAND flash memory devices having 3-dimensionally arranged memory cells and methods of fabricating the same
摘要 A NAND flash memory device includes a lower semiconductor layer and an upper semiconductor layer located over the lower semiconductor layer, a first drain region and a first source region located in the lower semiconductor layer, and a second drain region and a second source region located in the upper semiconductor layer. A first gate structure is located on the lower semiconductor layer, and a second gate structure is located on the upper semiconductor layer. A bit line is located over the upper semiconductor layer, and at least one bit line plug is connected between the bit line and the first drain region, where the at least one bit line plug extends through a drain throughhole located in the upper semiconductor layer.
申请公布号 US7602028(B2) 申请公布日期 2009.10.13
申请号 US20070653890 申请日期 2007.01.17
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 SON YANG-SOO;RAH YOUNG-SEOP;CHO WON-SEOK;JUNG SOON-MOON;JANG JAE-HOON;JANG YOUNG-CHUL
分类号 H01L29/76 主分类号 H01L29/76
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