发明名称 Method for manufacturing optical device
摘要 A method for manufacturing an optical device having an optical block, through which a light is transmitted, is provided. The method includes steps of: forming a plurality of silicon oxide members, which is disposed on a silicon substrate, wherein the silicon oxide members are arranged in parallel each other by a predetermined clearance between two adjacent silicon oxide members; and pouring a super critical fluid into the clearance so that the clearance is filled with a product formed from a predetermined compound for forming the optical block, wherein the predetermined compound is dissolved in the super critical fluid.
申请公布号 US7601551(B2) 申请公布日期 2009.10.13
申请号 US20060489670 申请日期 2006.07.20
申请人 DENSO CORPORATION 发明人 TAKEUCHI YUKIHIRO;OOHARA JUNJI
分类号 H01L21/66 主分类号 H01L21/66
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