发明名称 Process for forming a film, process for manufacturing a device, electro-optical device and electronic equipment
摘要 A liquid material is placed on a substrate as a droplet to form a film on the substrate. At least either one of a concentration of solids in the liquid material and a drying rate of the droplets is used as a parameter to control a form of a dried film of the droplets. Moreover, a first droplet is placed on a substrate, the first droplet is dried to form a dried film of a form in which a thickness of an edge is larger than that of a central part, and a second droplet is placed in a region surrounded by the edge section of a dried film of the first droplet to form a dried film of the second droplet. Furthermore, the liquid material is placed on the substrate as a droplet to form a film on the substrate, and a dried film of the droplet is formed by contracting the droplet.
申请公布号 US7601386(B2) 申请公布日期 2009.10.13
申请号 US20040867842 申请日期 2004.06.16
申请人 SEIKO EPSON CORPORATION 发明人 MASUDA TAKASHI
分类号 B05D5/12;H01L51/40 主分类号 B05D5/12
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